{"id":427,"date":"2023-05-14T17:43:34","date_gmt":"2023-05-14T15:43:34","guid":{"rendered":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/?page_id=427"},"modified":"2023-05-14T17:44:34","modified_gmt":"2023-05-14T15:44:34","slug":"jonathan-jenderny","status":"publish","type":"page","link":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/jonathan-jenderny\/","title":{"rendered":"Jonathan Jenderny, M.Sc."},"content":{"rendered":"<p>Researcher<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<p><strong>Address<\/strong><br>Ruhr-Uni\u00adver\u00adsi\u00adt\u00e4t Bo\u00adchum<br>Fakult\u00e4t f\u00fcr Elektrotechnik und Informationstechnik<br>Angewandte Elektrodynamik und Plasmatechnik<br>Uni\u00adver\u00adsi\u00adt\u00e4ts\u00adstra\u00ad\u00dfe 150<br>D-44801 Bo\u00adchum, Germany<\/p>\n\n\n\n<p><strong>Room<\/strong><br>ID 1\/523<\/p>\n\n\n\n<p><strong>Phone<\/strong><br>+49 234 32 28062<\/p>\n\n\n\n<p><strong>Email<\/strong><br>jenderny(at)aept.rub.de<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"682\" height=\"1024\" src=\"https:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/uploads\/2023\/05\/WEB-00765-sRGB-682x1024.jpg\" alt=\"\" class=\"wp-image-381\" srcset=\"https:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/uploads\/2023\/05\/WEB-00765-sRGB-682x1024.jpg 682w, https:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/uploads\/2023\/05\/WEB-00765-sRGB-200x300.jpg 200w, https:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/uploads\/2023\/05\/WEB-00765-sRGB-768x1152.jpg 768w, https:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/uploads\/2023\/05\/WEB-00765-sRGB.jpg 853w\" sizes=\"auto, (max-width: 682px) 100vw, 682px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\"\/>\n\n\n\n<p><strong>Publications<\/strong><\/p>\n\n\n<div id=\"zotpress-2e83cd1584cea788a28d67fe1bdabd2b\" class=\"zp-Zotpress zp-Zotpress-Bib wp-block-group\">\n\n\t\t<span class=\"ZP_API_USER_ID ZP_ATTR\">2825793<\/span>\n\t\t<span class=\"ZP_ITEM_KEY ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_COLLECTION_ID ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_TAG_ID ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_AUTHOR ZP_ATTR\">Jenderny<\/span>\n\t\t<span class=\"ZP_YEAR ZP_ATTR\"><\/span>\n        <span class=\"ZP_ITEMTYPE ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_INCLUSIVE ZP_ATTR\">1<\/span>\n\t\t<span class=\"ZP_STYLE ZP_ATTR\">apa<\/span>\n\t\t<span class=\"ZP_LIMIT ZP_ATTR\">50<\/span>\n\t\t<span class=\"ZP_SORTBY ZP_ATTR\">date<\/span>\n\t\t<span class=\"ZP_ORDER ZP_ATTR\">desc<\/span>\n\t\t<span class=\"ZP_TITLE ZP_ATTR\">year<\/span>\n\t\t<span class=\"ZP_SHOWIMAGE ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_SHOWTAGS ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_DOWNLOADABLE ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_NOTES ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_ABSTRACT ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_CITEABLE ZP_ATTR\">1<\/span>\n\t\t<span class=\"ZP_TARGET ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_URLWRAP ZP_ATTR\"><\/span>\n\t\t<span class=\"ZP_FORCENUM ZP_ATTR\"><\/span>\n        <span class=\"ZP_HIGHLIGHT ZP_ATTR\">Jenderny<\/span>\n        <span class=\"ZP_POSTID ZP_ATTR\">427<\/span>\n\t\t<span class=\"ZOTPRESS_PLUGIN_URL ZP_ATTR\">https:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/plugins\/zotpress\/<\/span>\n\n\t\t<div class=\"zp-List loading\">\n\t\t\t<div class=\"zp-SEO-Content\">\n\t\t\t\t<span class=\"ZP_JSON ZP_ATTR\">%7B%22status%22%3A%22success%22%2C%22updateneeded%22%3Afalse%2C%22instance%22%3Afalse%2C%22meta%22%3A%7B%22request_last%22%3A0%2C%22request_next%22%3A0%2C%22used_cache%22%3Atrue%7D%2C%22data%22%3A%5B%7B%22key%22%3A%22A3SVVW2X%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Osca%20Engelbrecht%20et%20al.%22%2C%22parsedDate%22%3A%222024-09-01%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%26lt%3Bdiv%20class%3D%26quot%3Bcsl-bib-body%26quot%3B%20style%3D%26quot%3Bline-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%26quot%3B%26gt%3B%5Cn%20%20%26lt%3Bdiv%20class%3D%26quot%3Bcsl-entry%26quot%3B%26gt%3BOsca%20Engelbrecht%2C%20M.%2C%20%26lt%3Bstrong%26gt%3BJenderny%26lt%3B%5C%2Fstrong%26gt%3B%2C%20J.%2C%20Hylla%2C%20H.%2C%20Filla%2C%20D.%2C%20Awakowicz%2C%20P.%2C%20Korolov%2C%20I.%2C%20Ridgers%2C%20C.%20P.%2C%20%26amp%3B%20Gibson%2C%20A.%20R.%20%282024%29.%20Numerical%20investigation%20of%20vacuum%20ultra-violet%20emission%20in%20Ar%5C%2FO%20%26lt%3Bsub%26gt%3B2%26lt%3B%5C%2Fsub%26gt%3B%20inductively%20coupled%20plasmas.%20%26lt%3Bi%26gt%3BPlasma%20Sources%20Science%20and%20Technology%26lt%3B%5C%2Fi%26gt%3B%2C%20%26lt%3Bi%26gt%3B33%26lt%3B%5C%2Fi%26gt%3B%289%29%2C%20095008.%20%26lt%3Ba%20class%3D%26%23039%3Bzp-DOIURL%26%23039%3B%20href%3D%26%23039%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fad7059%26%23039%3B%26gt%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1088%5C%2F1361-6595%5C%2Fad7059%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3Ba%20title%3D%26%23039%3BCite%20in%20RIS%20Format%26%23039%3B%20class%3D%26%23039%3Bzp-CiteRIS%26%23039%3B%20data-zp-cite%3D%26%23039%3Bapi_user_id%3D2825793%26amp%3Bitem_key%3DA3SVVW2X%26%23039%3B%20href%3D%26%23039%3Bjavascript%3Avoid%280%29%3B%26%23039%3B%26gt%3BCite%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3B%5C%2Fdiv%26gt%3B%5Cn%26lt%3B%5C%2Fdiv%26gt%3B%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Numerical%20investigation%20of%20vacuum%20ultra-violet%20emission%20in%20Ar%5C%2FO%20%3Csub%3E2%3C%5C%2Fsub%3E%20inductively%20coupled%20plasmas%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Michel%22%2C%22lastName%22%3A%22Osca%20Engelbrecht%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonathan%22%2C%22lastName%22%3A%22Jenderny%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Henrik%22%2C%22lastName%22%3A%22Hylla%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Dominik%22%2C%22lastName%22%3A%22Filla%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ihor%22%2C%22lastName%22%3A%22Korolov%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Christopher%20P%22%2C%22lastName%22%3A%22Ridgers%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Andrew%20R%22%2C%22lastName%22%3A%22Gibson%22%7D%5D%2C%22abstractNote%22%3A%22Controlling%20fluxes%20of%20vacuum%20ultraviolet%20%28VUV%29%20radiation%20is%20important%20in%20a%20number%20of%20industrial%20and%20biomedical%20applications%20of%20low%20pressure%20plasma%20sources%20because%2C%20depending%20on%20the%20process%2C%20VUV%20radiation%20may%20be%20desired%2C%20required%20to%20a%20certain%20degree%2C%20or%20unwanted.%20In%20this%20work%2C%20the%20emission%20of%20VUV%20radiation%20from%20O%20atoms%20is%20investigated%20in%20low-pressure%20Ar%5C%2FO2%20inductively%20coupled%20plasmas%20via%20numerical%20simulations.%20For%20this%20purpose%2C%20a%20self-consistent%20Ar%5C%2FO2%20plasma-chemical%20reaction%20scheme%20has%20been%20implemented%20in%20a%20zero%20dimensional%20plasma%20chemical%20kinetics%20model%20and%20is%20used%20to%20investigate%20VUV%20emission%20from%20excited%20O%20atoms%20%283s%205S02%20and%203s%203S01%29%20at%20130%20and%20135%20nm.%20The%20model%20is%20extensively%20compared%20with%20experimental%20measurements%20of%20absolute%20VUV%20emission%20intensities%2C%20electron%20densities%20and%20Ar%20excited%20state%20densities.%20In%20addition%2C%20oxygen%20VUV%20emission%20intensities%20are%20investigated%20as%20a%20function%20of%20pressure%2C%20Ar%5C%2FO2%20mixture%2C%20and%20power%20deposition%20and%20the%20dominant%20reaction%20pathways%20leading%20to%20oxygen%20VUV%20emission%20are%20identified%20and%20described.%20In%20general%20terms%2C%20absolute%20oxygen%20VUV%20emission%20intensities%20increase%20with%20power%20and%20oxygen%20fraction%20over%20the%20ranges%20investigated%20and%20peak%20emission%20intensities%20are%20found%20for%20pressures%20between%205%5Cu201350%20Pa.%20The%20emission%20is%20dominated%20by%20the%20130%20nm%20resonance%20line%20from%20the%20decay%20of%20the%20O%283s%203S01%29%20state%20to%20the%20ground%20state.%20Besides%2C%20at%20low%20pressure%20%280.3%5Cu20131%20Pa%29%2C%20the%20flux%20of%20oxygen%20VUV%20photons%20to%20surfaces%20is%20much%20lower%20than%20that%20of%20positive%20ions%2C%20whereas%20oxygen%20VUV%20fluxes%20dominate%20at%20higher%20pressure%2C%20%5Cu22735%5Cu201350%20Pa%20depending%20on%20O2%20fraction.%20Finally%2C%20oxygen%20atom%20fluxes%20to%20surfaces%20are%2C%20in%20general%2C%20larger%20than%20those%20of%20VUV%20photons%20for%20the%20parameter%20space%20investigated.%22%2C%22date%22%3A%222024-09-01%22%2C%22section%22%3A%22%22%2C%22partNumber%22%3A%22%22%2C%22partTitle%22%3A%22%22%2C%22DOI%22%3A%2210.1088%5C%2F1361-6595%5C%2Fad7059%22%2C%22citationKey%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fiopscience.iop.org%5C%2Farticle%5C%2F10.1088%5C%2F1361-6595%5C%2Fad7059%22%2C%22PMID%22%3A%22%22%2C%22PMCID%22%3A%22%22%2C%22ISSN%22%3A%220963-0252%2C%201361-6595%22%2C%22language%22%3A%22en%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222024-09-23T16%3A27%3A30Z%22%7D%7D%2C%7B%22key%22%3A%22HR5ZQEUS%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Jenderny%20et%20al.%22%2C%22parsedDate%22%3A%222024%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%26lt%3Bdiv%20class%3D%26quot%3Bcsl-bib-body%26quot%3B%20style%3D%26quot%3Bline-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%26quot%3B%26gt%3B%5Cn%20%20%26lt%3Bdiv%20class%3D%26quot%3Bcsl-entry%26quot%3B%26gt%3B%26lt%3Bstrong%26gt%3BJenderny%26lt%3B%5C%2Fstrong%26gt%3B%2C%20J.%2C%20Boysen%2C%20N.%2C%20Rubner%2C%20J.%2C%20Zysk%2C%20F.%2C%20Preischel%2C%20F.%2C%20Arcos%2C%20T.%20D.%20L.%2C%20Damerla%2C%20V.%20R.%2C%20Kostka%2C%20A.%2C%20Franke%2C%20J.%2C%20Dahlmann%2C%20R.%2C%20K%26%23xFC%3Bhne%2C%20T.%20D.%2C%20Wessling%2C%20M.%2C%20Awakowicz%2C%20P.%2C%20%26amp%3B%20Devi%2C%20A.%20%282024%29.%20Tuning%20the%20Permeation%20Properties%20of%20Poly%281%26%23x2010%3Btrimethylsilyl%26%23x2010%3B1%26%23x2010%3Bpropyne%29%20by%20Vapor%20Phase%20Infiltration%20Using%20Trimethylaluminum.%20%26lt%3Bi%26gt%3BAdvanced%20Materials%20Interfaces%26lt%3B%5C%2Fi%26gt%3B%2C%20%26lt%3Bi%26gt%3B11%26lt%3B%5C%2Fi%26gt%3B%2828%29%2C%202400171.%20%26lt%3Ba%20class%3D%26%23039%3Bzp-DOIURL%26%23039%3B%20href%3D%26%23039%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fadmi.202400171%26%23039%3B%26gt%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fadmi.202400171%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3Ba%20title%3D%26%23039%3BCite%20in%20RIS%20Format%26%23039%3B%20class%3D%26%23039%3Bzp-CiteRIS%26%23039%3B%20data-zp-cite%3D%26%23039%3Bapi_user_id%3D2825793%26amp%3Bitem_key%3DHR5ZQEUS%26%23039%3B%20href%3D%26%23039%3Bjavascript%3Avoid%280%29%3B%26%23039%3B%26gt%3BCite%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3B%5C%2Fdiv%26gt%3B%5Cn%26lt%3B%5C%2Fdiv%26gt%3B%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22Tuning%20the%20Permeation%20Properties%20of%20Poly%281%5Cu2010trimethylsilyl%5Cu20101%5Cu2010propyne%29%20by%20Vapor%20Phase%20Infiltration%20Using%20Trimethylaluminum%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonathan%22%2C%22lastName%22%3A%22Jenderny%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Nils%22%2C%22lastName%22%3A%22Boysen%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jens%22%2C%22lastName%22%3A%22Rubner%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Frederik%22%2C%22lastName%22%3A%22Zysk%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Florian%22%2C%22lastName%22%3A%22Preischel%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Teresa%20De%20Los%22%2C%22lastName%22%3A%22Arcos%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Varun%20Raj%22%2C%22lastName%22%3A%22Damerla%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Aleksander%22%2C%22lastName%22%3A%22Kostka%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonas%22%2C%22lastName%22%3A%22Franke%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Rainer%22%2C%22lastName%22%3A%22Dahlmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Thomas%20D.%22%2C%22lastName%22%3A%22K%5Cu00fchne%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Matthias%22%2C%22lastName%22%3A%22Wessling%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Anjana%22%2C%22lastName%22%3A%22Devi%22%7D%5D%2C%22abstractNote%22%3A%22Abstract%5Cn%20%20%20%20%20%20%20%20%20%20%20%20%5Cn%20%20%20%20%20%20%20%20%20%20%20%20%20%20Vapor%20phase%20infiltration%20%28VPI%29%20has%20emerged%20as%20a%20promising%20tool%20for%20fabrication%20of%20novel%20hybrid%20materials.%20In%20the%20field%20of%20polymeric%20gas%20separation%20membranes%2C%20a%20beneficial%20impact%20on%20stability%20and%20membrane%20performance%20is%20known%20for%20several%20polymers%20with%20differing%20functional%20groups.%20This%20study%20for%20the%20first%20time%20investigates%20VPI%20of%20trimethylaluminum%20%28TMA%29%20into%20poly%281%5Cu2010trimethylsilyl%5Cu20101%5Cu2010propyne%29%20%28PTMSP%29%2C%20featuring%20a%20carbon%5Cu2013carbon%20double%20bond%20as%20functional%20group.%20Saturation%20of%20the%20precursor%20inside%20the%20polymer%20is%20already%20attained%20after%2060%5Cu00a0s%20infiltration%20time%20leading%20to%20significant%20densification%20of%20the%20material.%20Depth%20profiling%20proves%20accumulation%20of%20aluminum%20in%20the%20polymer%20itself%2C%20but%20a%20significantly%20increased%20accumulation%20is%20visible%20in%20the%20gradient%20layer%20between%20polymer%20and%20SiO%5Cn%20%20%20%20%20%20%20%20%20%20%20%20%20%202%5Cn%20%20%20%20%20%20%20%20%20%20%20%20%20%20substrate.%20A%20reaction%20pathway%20is%20proposed%20and%20supplemented%20by%20density%5Cu2010functional%20theory%20%28DFT%29%20calculations.%20Infrared%20spectra%20derived%20from%20both%20experiments%20and%20simulation%20support%20the%20presented%20reaction%20pathway.%20In%20terms%20of%20permeance%2C%20a%20favorable%20impact%20on%20selectivity%20is%20observed%20for%20infiltration%20times%20up%20to%201%5Cu00a0s.%20Longer%20infiltration%20times%20yield%20greatly%20reduced%20permeance%20values%20close%20or%20even%20below%20the%20detection%20limit%20of%20the%20measurement%20device.%20The%20present%20results%20of%20this%20study%20set%20a%20strong%20basis%20for%20the%20application%20of%20VPI%20on%20polymers%20for%20gas%5Cu2010barrier%20and%20membrane%20applications%20in%20the%5Cu00a0future.%22%2C%22date%22%3A%2210%5C%2F2024%22%2C%22section%22%3A%22%22%2C%22partNumber%22%3A%22%22%2C%22partTitle%22%3A%22%22%2C%22DOI%22%3A%2210.1002%5C%2Fadmi.202400171%22%2C%22citationKey%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fadvanced.onlinelibrary.wiley.com%5C%2Fdoi%5C%2F10.1002%5C%2Fadmi.202400171%22%2C%22PMID%22%3A%22%22%2C%22PMCID%22%3A%22%22%2C%22ISSN%22%3A%222196-7350%2C%202196-7350%22%2C%22language%22%3A%22en%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222026-04-02T05%3A58%3A02Z%22%7D%7D%2C%7B%22key%22%3A%22EAQAJM94%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22De%20Los%20Arcos%20et%20al.%22%2C%22parsedDate%22%3A%222023-11-27%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%26lt%3Bdiv%20class%3D%26quot%3Bcsl-bib-body%26quot%3B%20style%3D%26quot%3Bline-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%26quot%3B%26gt%3B%5Cn%20%20%26lt%3Bdiv%20class%3D%26quot%3Bcsl-entry%26quot%3B%26gt%3BDe%20Los%20Arcos%2C%20T.%2C%20Awakowicz%2C%20P.%2C%20B%26%23xF6%3Bke%2C%20M.%2C%20Boysen%2C%20N.%2C%20Brinkmann%2C%20R.%20P.%2C%20Dahlmann%2C%20R.%2C%20Devi%2C%20A.%2C%20Eremin%2C%20D.%2C%20Franke%2C%20J.%2C%20Gergs%2C%20T.%2C%20%26lt%3Bstrong%26gt%3BJenderny%26lt%3B%5C%2Fstrong%26gt%3B%2C%20J.%2C%20Kemaneci%2C%20E.%2C%20K%26%23xFC%3Bhne%2C%20T.%20D.%2C%20Kusmierz%2C%20S.%2C%20Mussenbrock%2C%20T.%2C%20Rubner%2C%20J.%2C%20Trieschmann%2C%20J.%2C%20Wessling%2C%20M.%2C%20Xie%2C%20X.%2C%20%26%23x2026%3B%20Grundmeier%2C%20G.%20%282023%29.%20PECVD%20and%20PEALD%20on%20polymer%20substrates%20%28part%20II%29%3A%20Understanding%20and%20tuning%20of%20barrier%20and%20membrane%20properties%20of%20thin%20films.%20%26lt%3Bi%26gt%3BPlasma%20Processes%20and%20Polymers%26lt%3B%5C%2Fi%26gt%3B%2C%20e2300186.%20%26lt%3Ba%20class%3D%26%23039%3Bzp-DOIURL%26%23039%3B%20href%3D%26%23039%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fppap.202300186%26%23039%3B%26gt%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fppap.202300186%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3Ba%20title%3D%26%23039%3BCite%20in%20RIS%20Format%26%23039%3B%20class%3D%26%23039%3Bzp-CiteRIS%26%23039%3B%20data-zp-cite%3D%26%23039%3Bapi_user_id%3D2825793%26amp%3Bitem_key%3DEAQAJM94%26%23039%3B%20href%3D%26%23039%3Bjavascript%3Avoid%280%29%3B%26%23039%3B%26gt%3BCite%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3B%5C%2Fdiv%26gt%3B%5Cn%26lt%3B%5C%2Fdiv%26gt%3B%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22PECVD%20and%20PEALD%20on%20polymer%20substrates%20%28part%20II%29%3A%20Understanding%20and%20tuning%20of%20barrier%20and%20membrane%20properties%20of%20thin%20films%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Teresa%22%2C%22lastName%22%3A%22De%20Los%20Arcos%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Marc%22%2C%22lastName%22%3A%22B%5Cu00f6ke%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Nils%22%2C%22lastName%22%3A%22Boysen%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ralf%20Peter%22%2C%22lastName%22%3A%22Brinkmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Rainer%22%2C%22lastName%22%3A%22Dahlmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Anjana%22%2C%22lastName%22%3A%22Devi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Denis%22%2C%22lastName%22%3A%22Eremin%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonas%22%2C%22lastName%22%3A%22Franke%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Tobias%22%2C%22lastName%22%3A%22Gergs%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonathan%22%2C%22lastName%22%3A%22Jenderny%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Efe%22%2C%22lastName%22%3A%22Kemaneci%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Thomas%20D.%22%2C%22lastName%22%3A%22K%5Cu00fchne%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Simon%22%2C%22lastName%22%3A%22Kusmierz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Thomas%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jens%22%2C%22lastName%22%3A%22Rubner%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jan%22%2C%22lastName%22%3A%22Trieschmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Matthias%22%2C%22lastName%22%3A%22Wessling%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Xiaofan%22%2C%22lastName%22%3A%22Xie%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22David%22%2C%22lastName%22%3A%22Zanders%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Frederik%22%2C%22lastName%22%3A%22Zysk%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Guido%22%2C%22lastName%22%3A%22Grundmeier%22%7D%5D%2C%22abstractNote%22%3A%22This%20feature%20article%20presents%20insights%20concerning%20the%20correlation%20of%20plasmaenhanced%20chemical%20vapor%20deposition%20and%20plasma%5Cu2010enhanced%20atomic%20layer%20deposition%20thin%20film%20structures%20with%20their%20barrier%20or%20membrane%20properties.%20While%20in%20principle%20similar%20precursor%20gases%20and%20processes%20can%20be%20applied%2C%20the%20adjustment%20of%20deposition%20parameters%20for%20different%20polymer%20substrates%20can%20lead%20to%20either%20an%20effective%20diffusion%20barrier%20or%20selective%20permeabilities.%20In%20both%20cases%2C%20the%20understanding%20of%20the%20film%20growth%20and%20the%20analysis%20of%20the%20pore%20size%20distribution%20and%20the%20pore%20surface%20chemistry%20is%20of%20utmost%20importance%20for%20the%20understanding%20of%20the%20related%20transport%20properties%20of%20small%20molecules.%20In%20this%20regard%2C%20the%20article%20presents%20both%20concepts%20of%20thin%20film%20engineering%20and%20analytical%20as%20well%20as%20theoretical%20approaches%20leading%20to%20a%20comprehensive%20description%20of%20the%20state%20of%20the%20art%20in%20this%20field.%20Perspectives%20of%20future%20relevant%20research%20in%20this%20area%2C%20exploiting%20the%20presented%20correlation%20of%20film%20structure%20and%20molecular%20transport%20properties%2C%20are%20presented.%22%2C%22date%22%3A%222023-11-27%22%2C%22section%22%3A%22%22%2C%22partNumber%22%3A%22%22%2C%22partTitle%22%3A%22%22%2C%22DOI%22%3A%2210.1002%5C%2Fppap.202300186%22%2C%22citationKey%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fonlinelibrary.wiley.com%5C%2Fdoi%5C%2F10.1002%5C%2Fppap.202300186%22%2C%22PMID%22%3A%22%22%2C%22PMCID%22%3A%22%22%2C%22ISSN%22%3A%221612-8850%2C%201612-8869%22%2C%22language%22%3A%22en%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222023-11-29T07%3A49%3A34Z%22%7D%7D%2C%7B%22key%22%3A%22VECGDG7K%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22De%20Los%20Arcos%20et%20al.%22%2C%22parsedDate%22%3A%222023-10-30%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%26lt%3Bdiv%20class%3D%26quot%3Bcsl-bib-body%26quot%3B%20style%3D%26quot%3Bline-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%26quot%3B%26gt%3B%5Cn%20%20%26lt%3Bdiv%20class%3D%26quot%3Bcsl-entry%26quot%3B%26gt%3BDe%20Los%20Arcos%2C%20T.%2C%20Awakowicz%2C%20P.%2C%20Benedikt%2C%20J.%2C%20Biskup%2C%20B.%2C%20B%26%23xF6%3Bke%2C%20M.%2C%20Boysen%2C%20N.%2C%20Buschhaus%2C%20R.%2C%20Dahlmann%2C%20R.%2C%20Devi%2C%20A.%2C%20Gergs%2C%20T.%2C%20%26lt%3Bstrong%26gt%3BJenderny%26lt%3B%5C%2Fstrong%26gt%3B%2C%20J.%2C%20Von%20Keudell%2C%20A.%2C%20K%26%23xFC%3Bhne%2C%20T.%20D.%2C%20Kusmierz%2C%20S.%2C%20M%26%23xFC%3Bller%2C%20H.%2C%20Mussenbrock%2C%20T.%2C%20Trieschmann%2C%20J.%2C%20Zanders%2C%20D.%2C%20Zysk%2C%20F.%2C%20%26amp%3B%20Grundmeier%2C%20G.%20%282023%29.%20PECVD%20and%20PEALD%20on%20polymer%20substrates%20%28part%20I%29%3A%20Fundamentals%20and%20analysis%20of%20plasma%20activation%20and%20thin%20film%20growth.%20%26lt%3Bi%26gt%3BPlasma%20Processes%20and%20Polymers%26lt%3B%5C%2Fi%26gt%3B%2C%20e2300150.%20%26lt%3Ba%20class%3D%26%23039%3Bzp-DOIURL%26%23039%3B%20href%3D%26%23039%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fppap.202300150%26%23039%3B%26gt%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.1002%5C%2Fppap.202300150%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3Ba%20title%3D%26%23039%3BCite%20in%20RIS%20Format%26%23039%3B%20class%3D%26%23039%3Bzp-CiteRIS%26%23039%3B%20data-zp-cite%3D%26%23039%3Bapi_user_id%3D2825793%26amp%3Bitem_key%3DVECGDG7K%26%23039%3B%20href%3D%26%23039%3Bjavascript%3Avoid%280%29%3B%26%23039%3B%26gt%3BCite%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3B%5C%2Fdiv%26gt%3B%5Cn%26lt%3B%5C%2Fdiv%26gt%3B%22%2C%22data%22%3A%7B%22itemType%22%3A%22journalArticle%22%2C%22title%22%3A%22PECVD%20and%20PEALD%20on%20polymer%20substrates%20%28part%20I%29%3A%20Fundamentals%20and%20analysis%20of%20plasma%20activation%20and%20thin%20film%20growth%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Teresa%22%2C%22lastName%22%3A%22De%20Los%20Arcos%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jan%22%2C%22lastName%22%3A%22Benedikt%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Beatrix%22%2C%22lastName%22%3A%22Biskup%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Marc%22%2C%22lastName%22%3A%22B%5Cu00f6ke%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Nils%22%2C%22lastName%22%3A%22Boysen%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Rahel%22%2C%22lastName%22%3A%22Buschhaus%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Rainer%22%2C%22lastName%22%3A%22Dahlmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Anjana%22%2C%22lastName%22%3A%22Devi%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Tobias%22%2C%22lastName%22%3A%22Gergs%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonathan%22%2C%22lastName%22%3A%22Jenderny%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Achim%22%2C%22lastName%22%3A%22Von%20Keudell%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Thomas%20D.%22%2C%22lastName%22%3A%22K%5Cu00fchne%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Simon%22%2C%22lastName%22%3A%22Kusmierz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Hendrik%22%2C%22lastName%22%3A%22M%5Cu00fcller%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Thomas%22%2C%22lastName%22%3A%22Mussenbrock%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jan%22%2C%22lastName%22%3A%22Trieschmann%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22David%22%2C%22lastName%22%3A%22Zanders%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Frederik%22%2C%22lastName%22%3A%22Zysk%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Guido%22%2C%22lastName%22%3A%22Grundmeier%22%7D%5D%2C%22abstractNote%22%3A%22This%20feature%20article%20presents%20recent%20results%20on%20the%20analysis%20of%20plasma%5C%2Fpolymer%20interactions%20and%20the%20nucleation%20of%20ultra%5Cu2010thin%20plasma%20films%20on%20polymeric%20substrates.%20Because%20of%20their%20high%20importance%20for%20the%20understanding%20of%20such%20processes%2C%20in%20situ%20analytical%20approaches%20of%20the%20plasma%20volume%20as%20well%20as%20the%20plasma%5C%2Fsubstrate%20interfaces%20are%20introduced%20before%20the%20findings%20on%20plasma%20surface%20chemistry.%20The%20plasma%20activation%20of%20polymeric%20substrates%20is%20divided%20into%20the%20understanding%20of%20fundamental%20processes%20on%20model%20substrates%20and%20the%20relevance%20of%20polymer%20surface%20complexity.%20Concerning%20thin%20film%20nucleation%20and%20growth%2C%20both%20plasma%5Cu2010enhanced%20chemical%20vapor%20deposition%20and%20plasma%5Cu2010enhanced%20atomic%20layer%20deposition%20processes%20as%20well%20as%20the%20combination%20of%20both%20processes%20are%20considered%20both%20for%20model%20substrates%20and%20technical%20polymers.%20Based%20on%20the%20comprehensive%20presentation%20of%20recent%20results%2C%20selective%20perspectives%20of%20this%20research%20field%20are%20discussed.%22%2C%22date%22%3A%222023-10-30%22%2C%22section%22%3A%22%22%2C%22partNumber%22%3A%22%22%2C%22partTitle%22%3A%22%22%2C%22DOI%22%3A%2210.1002%5C%2Fppap.202300150%22%2C%22citationKey%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fonlinelibrary.wiley.com%5C%2Fdoi%5C%2F10.1002%5C%2Fppap.202300150%22%2C%22PMID%22%3A%22%22%2C%22PMCID%22%3A%22%22%2C%22ISSN%22%3A%221612-8850%2C%201612-8869%22%2C%22language%22%3A%22en%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222023-11-02T11%3A26%3A49Z%22%7D%7D%2C%7B%22key%22%3A%22W2TY6RFS%22%2C%22library%22%3A%7B%22id%22%3A2825793%7D%2C%22meta%22%3A%7B%22creatorSummary%22%3A%22Pohle%20et%20al.%22%2C%22parsedDate%22%3A%222021-01-12%22%2C%22numChildren%22%3A1%7D%2C%22bib%22%3A%22%26lt%3Bdiv%20class%3D%26quot%3Bcsl-bib-body%26quot%3B%20style%3D%26quot%3Bline-height%3A%202%3B%20padding-left%3A%201em%3B%20text-indent%3A-1em%3B%26quot%3B%26gt%3B%5Cn%20%20%26lt%3Bdiv%20class%3D%26quot%3Bcsl-entry%26quot%3B%26gt%3BPohle%2C%20D.%2C%20Mitschker%2C%20F.%2C%20%26lt%3Bstrong%26gt%3BJenderny%26lt%3B%5C%2Fstrong%26gt%3B%2C%20J.%2C%20Rudolph%2C%20M.%2C%20Schulz%2C%20C.%2C%20Awakowicz%2C%20P.%2C%20%26amp%3B%20Rolfes%2C%20I.%20%282021%29.%20A%20Minimally%20Invasive%20Monitoring%20Concept%20for%20Plasma-Assisted%20Surface%20Treatments%20in%20PET%20Bottles.%20%26lt%3Bi%26gt%3B2020%2050th%20European%20Microwave%20Conference%20%28EuMC%29%26lt%3B%5C%2Fi%26gt%3B%2C%20479%26%23x2013%3B482.%20%26lt%3Ba%20class%3D%26%23039%3Bzp-DOIURL%26%23039%3B%20href%3D%26%23039%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.23919%5C%2FEuMC48046.2021.9338200%26%23039%3B%26gt%3Bhttps%3A%5C%2F%5C%2Fdoi.org%5C%2F10.23919%5C%2FEuMC48046.2021.9338200%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3Ba%20title%3D%26%23039%3BCite%20in%20RIS%20Format%26%23039%3B%20class%3D%26%23039%3Bzp-CiteRIS%26%23039%3B%20data-zp-cite%3D%26%23039%3Bapi_user_id%3D2825793%26amp%3Bitem_key%3DW2TY6RFS%26%23039%3B%20href%3D%26%23039%3Bjavascript%3Avoid%280%29%3B%26%23039%3B%26gt%3BCite%26lt%3B%5C%2Fa%26gt%3B%20%26lt%3B%5C%2Fdiv%26gt%3B%5Cn%26lt%3B%5C%2Fdiv%26gt%3B%22%2C%22data%22%3A%7B%22itemType%22%3A%22conferencePaper%22%2C%22title%22%3A%22A%20Minimally%20Invasive%20Monitoring%20Concept%20for%20Plasma-Assisted%20Surface%20Treatments%20in%20PET%20Bottles%22%2C%22creators%22%3A%5B%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Dennis%22%2C%22lastName%22%3A%22Pohle%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Felix%22%2C%22lastName%22%3A%22Mitschker%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Jonathan%22%2C%22lastName%22%3A%22Jenderny%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Marcel%22%2C%22lastName%22%3A%22Rudolph%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Christian%22%2C%22lastName%22%3A%22Schulz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Peter%22%2C%22lastName%22%3A%22Awakowicz%22%7D%2C%7B%22creatorType%22%3A%22author%22%2C%22firstName%22%3A%22Ilona%22%2C%22lastName%22%3A%22Rolfes%22%7D%5D%2C%22abstractNote%22%3A%22This%20paper%20presents%20a%20novel%20approach%20to%20plasma%20monitoring%20in%20the%20context%20of%20plasma-assisted%20surface%20treatments%20in%20PET%20bottles.%20In%20industrial%20state-of-the-art%20production%20of%20PET-based%20beverage%20bottles%2C%20a%20so-called%20Plasmaline%20antenna%20is%20inserted%20into%20the%20bottle%20which%20provides%20both%20process%20gases%20and%20microwave%20excitation%20to%20generate%20the%20plasma%20state%20required%20for%20coating%20or%20sterilization%20on%20its%20inside.%20The%20proposed%20concept%20based%20on%20the%20planar%20multipole%20resonance%20probe%20%28pMRP%29%20allows%20for%20a%20non-invasive%20supervision%20of%20the%20plasma%20from%20the%20outside%20of%20the%20bottle%20wall.%20Since%20plasma%20and%20probe%20head%20are%20only%20separated%20by%20dielectric%20materials%20in%20between%2C%20the%20sensor%5Cu2019s%20electric%20%5Cufb01eld%20is%20able%20to%20interact%20with%20the%20plasma%20and%20the%20resonance%20behavior%20that%20occurs%20can%20be%20evaluated%20and%20tracked.%20The%20performance%20of%20the%20concept%20regarding%20changes%20of%20the%20plasma%20electron%20frequency%20and%20the%20electron%20collision%20frequency%20are%20investigated%20within%203D%20full-wave%20simulations%20in%20CST%20Microwave%20Studio.%20Measurements%20of%20an%20argon%20plasma%20are%20presented%20as%20a%20proof-of-concept%2C%20with%20the%20plasma%20being%20monitored%20from%20the%20plasma-remote%20side%20of%20a%20PET%20bottle%20section.%22%2C%22proceedingsTitle%22%3A%222020%2050th%20European%20Microwave%20Conference%20%28EuMC%29%22%2C%22conferenceName%22%3A%222020%2050th%20European%20Microwave%20Conference%20%28EuMC%29%22%2C%22date%22%3A%222021-1-12%22%2C%22eventPlace%22%3A%22%22%2C%22DOI%22%3A%2210.23919%5C%2FEuMC48046.2021.9338200%22%2C%22ISBN%22%3A%22978-2-87487-059-0%22%2C%22citationKey%22%3A%22%22%2C%22url%22%3A%22https%3A%5C%2F%5C%2Fieeexplore.ieee.org%5C%2Fdocument%5C%2F9338200%5C%2F%22%2C%22ISSN%22%3A%22%22%2C%22language%22%3A%22en%22%2C%22collections%22%3A%5B%5D%2C%22dateModified%22%3A%222021-07-18T05%3A37%3A07Z%22%7D%7D%5D%7D<\/span>\n\n\t\t\t\t<div id=\"zp-ID-427-2825793-A3SVVW2X\" data-zp-author-date='Osca-Engelbrecht-et-al.-2024-09-01' data-zp-date-author='2024-09-01-Osca-Engelbrecht-et-al.' data-zp-date='2024-09-01' data-zp-year='2024' data-zp-itemtype='journalArticle' class=\"zp-Entry zpSearchResultsItem\">\n<div class=\"csl-bib-body\" style=\"line-height: 2; padding-left: 1em; text-indent:-1em;\">\n  <div class=\"csl-entry\">Osca Engelbrecht, M., <strong>Jenderny<\/strong>, J., Hylla, H., Filla, D., Awakowicz, P., Korolov, I., Ridgers, C. P., & Gibson, A. R. (2024). Numerical investigation of vacuum ultra-violet emission in Ar\/O <sub>2<\/sub> inductively coupled plasmas. <i>Plasma Sources Science and Technology<\/i>, <i>33<\/i>(9), 095008. <a class='zp-DOIURL' href='https:\/\/doi.org\/10.1088\/1361-6595\/ad7059'>https:\/\/doi.org\/10.1088\/1361-6595\/ad7059<\/a> <a title='Cite in RIS Format' class='zp-CiteRIS' data-zp-cite='api_user_id=2825793&item_key=A3SVVW2X' href='javascript:void(0);'>Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div><!-- .zp-Entry .zpSearchResultsItem -->\t\t\t\t<div id=\"zp-ID-427-2825793-HR5ZQEUS\" data-zp-author-date='Jenderny-et-al.-2024' data-zp-date-author='2024-Jenderny-et-al.' data-zp-date='2024' data-zp-year='2024' data-zp-itemtype='journalArticle' class=\"zp-Entry zpSearchResultsItem\">\n<div class=\"csl-bib-body\" style=\"line-height: 2; padding-left: 1em; text-indent:-1em;\">\n  <div class=\"csl-entry\"><strong>Jenderny<\/strong>, J., Boysen, N., Rubner, J., Zysk, F., Preischel, F., Arcos, T. D. L., Damerla, V. R., Kostka, A., Franke, J., Dahlmann, R., K\u00fchne, T. D., Wessling, M., Awakowicz, P., & Devi, A. (2024). Tuning the Permeation Properties of Poly(1\u2010trimethylsilyl\u20101\u2010propyne) by Vapor Phase Infiltration Using Trimethylaluminum. <i>Advanced Materials Interfaces<\/i>, <i>11<\/i>(28), 2400171. <a class='zp-DOIURL' href='https:\/\/doi.org\/10.1002\/admi.202400171'>https:\/\/doi.org\/10.1002\/admi.202400171<\/a> <a title='Cite in RIS Format' class='zp-CiteRIS' data-zp-cite='api_user_id=2825793&item_key=HR5ZQEUS' href='javascript:void(0);'>Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div><!-- .zp-Entry .zpSearchResultsItem -->\t\t\t\t<div id=\"zp-ID-427-2825793-EAQAJM94\" data-zp-author-date='De-Los-Arcos-et-al.-2023-11-27' data-zp-date-author='2023-11-27-De-Los-Arcos-et-al.' data-zp-date='2023-11-27' data-zp-year='2023' data-zp-itemtype='journalArticle' class=\"zp-Entry zpSearchResultsItem\">\n<div class=\"csl-bib-body\" style=\"line-height: 2; padding-left: 1em; text-indent:-1em;\">\n  <div class=\"csl-entry\">De Los Arcos, T., Awakowicz, P., B\u00f6ke, M., Boysen, N., Brinkmann, R. P., Dahlmann, R., Devi, A., Eremin, D., Franke, J., Gergs, T., <strong>Jenderny<\/strong>, J., Kemaneci, E., K\u00fchne, T. D., Kusmierz, S., Mussenbrock, T., Rubner, J., Trieschmann, J., Wessling, M., Xie, X., \u2026 Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films. <i>Plasma Processes and Polymers<\/i>, e2300186. <a class='zp-DOIURL' href='https:\/\/doi.org\/10.1002\/ppap.202300186'>https:\/\/doi.org\/10.1002\/ppap.202300186<\/a> <a title='Cite in RIS Format' class='zp-CiteRIS' data-zp-cite='api_user_id=2825793&item_key=EAQAJM94' href='javascript:void(0);'>Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div><!-- .zp-Entry .zpSearchResultsItem -->\t\t\t\t<div id=\"zp-ID-427-2825793-VECGDG7K\" data-zp-author-date='De-Los-Arcos-et-al.-2023-10-30' data-zp-date-author='2023-10-30-De-Los-Arcos-et-al.' data-zp-date='2023-10-30' data-zp-year='2023' data-zp-itemtype='journalArticle' class=\"zp-Entry zpSearchResultsItem\">\n<div class=\"csl-bib-body\" style=\"line-height: 2; padding-left: 1em; text-indent:-1em;\">\n  <div class=\"csl-entry\">De Los Arcos, T., Awakowicz, P., Benedikt, J., Biskup, B., B\u00f6ke, M., Boysen, N., Buschhaus, R., Dahlmann, R., Devi, A., Gergs, T., <strong>Jenderny<\/strong>, J., Von Keudell, A., K\u00fchne, T. D., Kusmierz, S., M\u00fcller, H., Mussenbrock, T., Trieschmann, J., Zanders, D., Zysk, F., & Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. <i>Plasma Processes and Polymers<\/i>, e2300150. <a class='zp-DOIURL' href='https:\/\/doi.org\/10.1002\/ppap.202300150'>https:\/\/doi.org\/10.1002\/ppap.202300150<\/a> <a title='Cite in RIS Format' class='zp-CiteRIS' data-zp-cite='api_user_id=2825793&item_key=VECGDG7K' href='javascript:void(0);'>Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div><!-- .zp-Entry .zpSearchResultsItem -->\t\t\t\t<div id=\"zp-ID-427-2825793-W2TY6RFS\" data-zp-author-date='Pohle-et-al.-2021-01-12' data-zp-date-author='2021-01-12-Pohle-et-al.' data-zp-date='2021-01-12' data-zp-year='2021' data-zp-itemtype='conferencePaper' class=\"zp-Entry zpSearchResultsItem\">\n<div class=\"csl-bib-body\" style=\"line-height: 2; padding-left: 1em; text-indent:-1em;\">\n  <div class=\"csl-entry\">Pohle, D., Mitschker, F., <strong>Jenderny<\/strong>, J., Rudolph, M., Schulz, C., Awakowicz, P., & Rolfes, I. (2021). A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles. <i>2020 50th European Microwave Conference (EuMC)<\/i>, 479\u2013482. <a class='zp-DOIURL' href='https:\/\/doi.org\/10.23919\/EuMC48046.2021.9338200'>https:\/\/doi.org\/10.23919\/EuMC48046.2021.9338200<\/a> <a title='Cite in RIS Format' class='zp-CiteRIS' data-zp-cite='api_user_id=2825793&item_key=W2TY6RFS' href='javascript:void(0);'>Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div><!-- .zp-Entry .zpSearchResultsItem -->\n\t\t\t<\/div><!-- .zp-zp-SEO-Content -->\n\t\t<\/div><!-- .zp-List -->\n\t<\/div><!--.zp-Zotpress-->","protected":false},"excerpt":{"rendered":"<p>Researcher AddressRuhr-Uni\u00adver\u00adsi\u00adt\u00e4t Bo\u00adchumFakult\u00e4t f\u00fcr Elektrotechnik und InformationstechnikAngewandte Elektrodynamik und PlasmatechnikUni\u00adver\u00adsi\u00adt\u00e4ts\u00adstra\u00ad\u00dfe 150D-44801 Bo\u00adchum, Germany RoomID 1\/523 Phone+49 234 32 28062 Emailjenderny(at)aept.rub.de Publications<\/p>","protected":false},"author":3,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-427","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages\/427","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/comments?post=427"}],"version-history":[{"count":2,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages\/427\/revisions"}],"predecessor-version":[{"id":430,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages\/427\/revisions\/430"}],"wp:attachment":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/media?parent=427"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}