{"id":395,"date":"2023-05-14T17:25:57","date_gmt":"2023-05-14T15:25:57","guid":{"rendered":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/?page_id=395"},"modified":"2023-05-14T17:25:57","modified_gmt":"2023-05-14T15:25:57","slug":"dr-ing-sebastian-wilczek","status":"publish","type":"page","link":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/dr-ing-sebastian-wilczek\/","title":{"rendered":"Dr.-Ing. Sebastian Wilczek"},"content":{"rendered":"

Senior Researcher<\/p>\n\n\n\n

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Address<\/strong>
Ruhr-Uni\u00adver\u00adsi\u00adt\u00e4t Bo\u00adchum
Fakult\u00e4t f\u00fcr Elektrotechnik und Informationstechnik
Angewandte Elektrodynamik und Plasmatechnik
Uni\u00adver\u00adsi\u00adt\u00e4ts\u00adstra\u00ad\u00dfe 150
D-44801 Bo\u00adchum, Germany<\/p>\n\n\n\n

Room<\/strong>
ID 1\/529<\/p>\n\n\n\n

Phone<\/strong>
+49 234 32 29845<\/p>\n\n\n\n

Email<\/strong>
wilczek(at)aept.rub.de<\/p>\n<\/div>\n\n\n\n

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\"\"<\/figure>\n<\/div>\n<\/div>\n\n\n\n
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Publications<\/strong><\/p>\n\n\n

\n\n\t\t2825793<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\tWilczek<\/span>\n\t\t<\/span>\n <\/span>\n\t\t1<\/span>\n\t\tapa<\/span>\n\t\t50<\/span>\n\t\tdate<\/span>\n\t\tdesc<\/span>\n\t\tyear<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\t1<\/span>\n\t\t<\/span>\n\t\t<\/span>\n\t\t<\/span>\n Wilczek<\/span>\n 395<\/span>\n\t\thttps:\/\/aept.blogs.ruhr-uni-bochum.de\/wp-content\/plugins\/zotpress\/<\/span>\n\n\t\t
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Vass, M., Wang, L., Wilczek<\/strong>, S., Lafleur, T., Brinkmann, R. P., Donk\u00f3, Z., & Schulze, J. (2022). Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis. Plasma Sources Science and Technology<\/i>, 31<\/i>(11), 115004. https:\/\/doi.org\/10.1088\/1361-6595\/ac9754<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Klich, M., L\u00f6wer, J., Wilczek<\/strong>, S., Mussenbrock, T., & Brinkmann, R. P. (2022). Validation of the smooth step model by particle-in-cell\/Monte Carlo collisions simulations. Plasma Sources Science and Technology<\/i>, 31<\/i>(4), 045014. https:\/\/doi.org\/10.1088\/1361-6595\/ac5dd3<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Vass, M., Wilczek<\/strong>, S., Derzsi, A., Horv\u00e1th, B., Hartmann, P., & Donk\u00f3, Z. (2022). Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures. Plasma Sources Science and Technology<\/i>, 31<\/i>(4), 045017. https:\/\/doi.org\/10.1088\/1361-6595\/ac6361<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Vass, M., Wilczek<\/strong>, S., Schulze, J., & Donk\u00f3, Z. (2021). Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He\/N 2<\/sub>. Plasma Sources Science and Technology<\/i>, 30<\/i>(10), 105010. https:\/\/doi.org\/10.1088\/1361-6595\/ac278c<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Donko, Z., Derzsi, A., Vass, M., Horv\u00e1th, B., Wilczek<\/strong>, S., Hartmann, B., & Hartmann, P. (2021). eduPIC: an introductory particle based code for radio-frequency plasma simulation. Plasma Sources Science and Technology<\/i>. https:\/\/doi.org\/10.1088\/1361-6595\/ac0b55<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Vass, M., Wilczek<\/strong>, S., Lafleur, T., Brinkmann, R. P., Donk\u00f3, Z., & Schulze, J. (2021). Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation. Plasma Sources Science and Technology<\/i>, 30<\/i>(6), 065015. https:\/\/doi.org\/10.1088\/1361-6595\/ac0486<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Klich, M., Wilczek<\/strong>, S., Janssen, J. F. J., Brinkmann, R. P., Mussenbrock, T., & Trieschmann, J. (2021). Ion dynamics in capacitively coupled argon\u2013xenon discharges. Plasma Sources Science and Technology<\/i>, 30<\/i>(6), 065019. https:\/\/doi.org\/10.1088\/1361-6595\/ac02b0<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Hartmann, P., Wang, L., N\u00f6sges, K., Berger, B., Wilczek<\/strong>, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donk\u00f3, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics<\/i>, 54<\/i>, 255202. https:\/\/doi.org\/10.1088\/1361-6463\/abf229<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Vass, M., Wilczek<\/strong>, S., Lafleur, T., Brinkmann, R. P., Donk\u00f3, Z., & Schulze, J. (2020). Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure. Plasma Sources Science and Technology<\/i>, 29<\/i>(8), 085014. https:\/\/doi.org\/10.1088\/1361-6595\/aba111<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Hartmann, P., Wang, L., N\u00f6sges, K., Berger, B., Wilczek<\/strong>, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donk\u00f3, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Plasma Sources Science and Technology<\/i>, 54<\/i>, 075014. https:\/\/doi.org\/10.1088\/1361-6595\/ab9374<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Wilczek<\/strong>, S., Schulze, J., Brinkmann, R. P., Donk\u00f3, Z., Trieschmann, J., & Mussenbrock, T. (2020). Electron dynamics in low pressure capacitively coupled radio frequency discharges. Journal of Applied Physics<\/i>, 127<\/i>(18), 181101. https:\/\/doi.org\/10.1063\/5.0003114<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Vass, M., Wilczek<\/strong>, S., Lafleur, T., Brinkmann, R. P., Donk\u00f3, Z., & Schulze, J. (2020). Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas. Plasma Sources Science and Technology<\/i>, 29<\/i>(2), 025019. https:\/\/doi.org\/10.1088\/1361-6595\/ab5f27<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Kr\u00fcger, F., Wilczek<\/strong>, S., Mussenbrock, T., & Schulze, J. (2019). Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches. Plasma Sources Science and Technology<\/i>, 28<\/i>(7), 075017. https:\/\/doi.org\/10.1088\/1361-6595\/ab2c72<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Wilczek<\/strong>, S., Trieschmann, J., Schulze, J., Donk\u00f3, Z., Brinkmann, R. P., & Mussenbrock, T. (2018). Disparity between current and voltage driven capacitively coupled radio frequency discharges. Plasma Sources Science and Technology<\/i>, 27<\/i>(12), 125010. https:\/\/doi.org\/10.1088\/1361-6595\/aae5c1<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Schulze, J., Donk\u00f3, Z., Lafleur, T., Wilczek<\/strong>, S., & Brinkmann, R. P. (2018). Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation. Plasma Sources Science and Technology<\/i>, 27<\/i>(5), 055010. https:\/\/doi.org\/10.1088\/1361-6595\/aabebc<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Daksha, M., Derzsi, A., Wilczek<\/strong>, S., Trieschmann, J., Mussenbrock, T., Awakowicz, P., Donk\u00f3, Z., & Schulze, J. (2017). The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas. Plasma Sources Science and Technology<\/i>, 26<\/i>(8), 085006. https:\/\/doi.org\/10.1088\/1361-6595\/aa7c88<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Wilczek<\/strong>, S., Trieschmann, J., Eremin, D., Brinkmann, R. P., Schulze, J., Schuengel, E., Derzsi, A., Korolov, I., Hartmann, P., Donk\u00f3, Z., & Mussenbrock, T. (2016). Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas. Physics of Plasmas<\/i>, 23<\/i>(6), 063514. https:\/\/doi.org\/10.1063\/1.4953432<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\t\t\t\t
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Wilczek<\/strong>, S., Trieschmann, J., Schulze, J., Schuengel, E., Brinkmann, R. P., Derzsi, A., Korolov, I., Donk\u00f3, Z., & Mussenbrock, T. (2015). The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges. Plasma Sources Science and Technology<\/i>, 24<\/i>(2), 024002. https:\/\/doi.org\/10.1088\/0963-0252\/24\/2\/024002<\/a> Cite<\/a> <\/div>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\t\t<\/div>\n\t<\/div>","protected":false},"excerpt":{"rendered":"

Senior Researcher AddressRuhr-Uni\u00adver\u00adsi\u00adt\u00e4t Bo\u00adchumFakult\u00e4t f\u00fcr Elektrotechnik und InformationstechnikAngewandte Elektrodynamik und PlasmatechnikUni\u00adver\u00adsi\u00adt\u00e4ts\u00adstra\u00ad\u00dfe 150D-44801 Bo\u00adchum, Germany RoomID 1\/529 Phone+49 234 32 29845 Emailwilczek(at)aept.rub.de Publications<\/p>","protected":false},"author":3,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-395","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages\/395","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/comments?post=395"}],"version-history":[{"count":1,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages\/395\/revisions"}],"predecessor-version":[{"id":396,"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/pages\/395\/revisions\/396"}],"wp:attachment":[{"href":"https:\/\/aept.blogs.ruhr-uni-bochum.de\/de\/wp-json\/wp\/v2\/media?parent=395"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}